SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 06/25/2013Revised (if Applicable): 07/09/2014

Document Number: 5618
SNARF for: New Standard: Specification for Preservation of Recipe Integrity

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
From the list of opportunities to improve recipe creation, management, and execution, two were chosen for the first effort of the Recipe Integrity Task Force.

1. Recipe header – the content of most equipment recipes is opaque to the user. This effort will add to the recipe a set of information that describes the recipe and helps with its proper use. The goal is to preserve the existing recipe body unchanged in order to allow recipe execution to be unaffected. The recipe header information will be added to the existing recipe body.The recipe header will contain various data fields that describe the recipe. It is expected to include a description, creation time, creation location, available recipe variable parameters, links to any sub-recipes, and other items of data. The proposed solution is expected to address both formatted and unformatted recipes/process programs/process recipes.

2. Recipe variable parameter availability – on many production equipment today, the need for recipe variable parameters outstrips the availability of those parameters. Standard language is needed to set common expectations for the equipment supplier and the user regarding the availability of recipe variable parameters.

An overall goal of backward compatibility is recognized. This may be accomplished by asking that the equipment allow the user to enable/disable these new capabilities where they may not be compatible with existing host systems.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The SEMI specification will address two areas in its first version. The two areas are:

1. Recipe header – while preserving existing recipe format and content, a user accessible collection of information describing the recipe and its use will be added to accompany the recipe body. The task force will determine the final list of information.

2. Recipe variable parameter availability – the specification will standardize a definition of which parameters within the equipment recipe must be made available as recipe variable parameters that can be set at run time (e.g., using SEMI E40 ProcessJobs).

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/10/2013b. 1st Draft by: 10/15/2013
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/12/2014
e. TC Chapter Approval By:11/05/2014

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
GEM300 TF (Japan and Korea)
Equipment Automation Committee (Europe)
Information & Control Committee (Taiwan)

Intercommittee Ballot will NOT be issued.

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
This activity will result in a SEMI specification that standardizes the recipe identifier, a recipe header, and consistent availability of recipe variable parameters.

Will include copyrighted material:
Content from SEMATECH guide – release will be provided

SEMI Staff Note:
- SNARF revised in 10/30/2013. Scope section updated and copyright box checked (SEMATECH guide)
- SNARF revised again in 07/09/2014. Removed "Recipe Identifier" from Rationale and Scope sections. Timelines updated.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/10/2013
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on