SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5591
SNARF for: Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed revisions related to fire code criteria

Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Fire Protection Task Force

1. Rationale: The proposed change to SEMI S2 is to better align the criteria with the fire code criteria included in NFPA and IFC.
Rate the Estimated Effect on the Industry
3: Major effect on a few companies - identify the relevant companies

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
This activity is to generate a line item modification of SEMI S2, section 14. A similar line item change to SEMI S26 may also be appropriate but needs to be confirmed or completed by the S26 TF.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/04/2013b. 1st Draft by:
c. Preballot by: d. Technical Ballot by: 05/20/2013
e. Committee Approval By:07/11/2013

Safety Considerations:
The resulting document is expected to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on April 4, 2013