SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 02/04/2017Revised (if Applicable):

Document Number: 6193
SNARF for: New Standard: Specification for Trichlorosilane Used in Polysilicon Production

Originating Global Technical Committee: Photovoltaic (PV) - Materials
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: PV Silicon Raw Materials Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
With the increase of the photovoltaic market, the demand of customers for quality of polysilicon is higher and higher. Trichlorosilane is the main raw material of polysilicon production, the content of impurity in trichlorosilane will directly affect the quality of the polysilicon. The standard for trichlorosilane is helpful to guide the production at different levels. Based on the content of impurities in TCS, It will be divided into different grades. Consult the SEMI, IEC, UL, ASTM standards, no trichlorosilane related standards,thus it is necessary to make a standard of trichlorosilane to guide the production of polysilicon, and to avoid the waste of quality.

b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Module manufactory, PV System

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This standard mainly specifies the quality index of trichlorosilane used in polysilicon production, gives the quality control range of trace impurity in trichlorosilane. The quality certification of trichlorosilane is the content of component and trace impurity, through them to determine the quality of trichlorosilane.
The test method of this standard mainly includes two aspects: component analysis and the impurities analysis.
1、Component analysis: Gas chromatography, each component in mixture has special boiling point, polarity, adsorption qualitative and so on. Using the above features, we separate and analysis each component.
2、The impurities analysis: Treated the trichlorosilane with chemical method, then measured by ICP-MS.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 02/10/2017b. 1st Draft by: 04/01/2017
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/01/2017
e. TC Chapter Approval By:08/01/2018

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Photovoltaic Materials Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (see Procedure Manual 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Liquid Chemicals
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 2017/3/21
Member Review End Date: 2017/4/4

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS04/18/2017
Recorded in TC Minutes05/02/2017


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

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