SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/12/2018Revised (if Applicable): 06/10/2019

Document Number: 6485
SNARF for: New Standard - SPECIFICATION FOR PANEL FOUP FOR PANEL LEVEL PACKAGING

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Panel Level Packaging Panel FOUP Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Panel Level Packaging (PLP) is under development and expected to become a critical 3D integration and packaging process. Panel FOUP Standardization is delaying the introduction of the technology due to the need to customize tools and processes for Automated handling interface, Loadport interface and mini-environment base on the Panel size.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Panel FOUP Designed by the Panel size for 515mm x 510mm and 600mm x600mm.
·Door interface
Common for both panel sizes: door position relative to FP, latch key, suction pads positions
Specific for each panel size: door width
·Bottom interface:common for both panel sizes excluding the conveyor rails
·Maximum outer size of FOUP for each panel size.
·2 Slot type: 12slot and 6slot (Note: Maximum slot numbers is limited by height)
·AMHS Interface
·Carrier (FOUP) ID: RF-ID only
NOTE:”Panel” includes Panel with or without carrier


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 05/17/2018b. 1st Draft by: 03/31/2019
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/30/2019
e. TC Chapter Approval By:09/30/2019

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
3D Packaging and Integration

b. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
3D Packaging and Integration
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Revised SNARF is approved on June 25, 2019 by GCS

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 11/27/2018.
Member Review End Date: 12/10/2018.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/12/2018
Recorded in TC Minutes12/12/2018

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


Attach Pictures and Files here:
#6485_SNARF_FOUP_R1_ACT.pdf#6485_SNARF_FOUP_R1_ACT.pdf