SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 09/28/2020
Revised (if Applicable): 09/30/2021

Name of Task Force (TF): SiC Epitaxial Wafer Task Force

Global Technical Committee: Compound Semiconductor Materials
Originating Technical Committee Region: China


_____________________________________________________________________________
1. Charter: (State the objective of the proposed TF.)
To establish a uniform specification for SiC Epitaxial materials and wafers at the global.
_____________________________________________________________________________
2. Scope: (Define the specific activities that the TF will conduct.)
Establish standards of SiC epitaxial wafer for power devices
_____________________________________________________________________________
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Europe SiC Material and Wafer Specification TF
_____________________________________________________________________________
4. Formation Date:(TF formed on)

Task Force formed on: 09/28/2020
Task Force approved by Committee/GCS on: 09/28/2020

5. Comments
None.