SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
09/28/2020
Revised (if Applicable):
09/30/2021
Name of Task Force (TF):
SiC Epitaxial Wafer Task Force
Global Technical Committee:
Compound Semiconductor Materials
Originating Technical Committee Region:
China
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1. Charter:
(State the objective of the proposed TF.)
To establish a uniform specification for SiC Epitaxial materials and wafers at the global.
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2. Scope:
(Define the specific activities that the TF will conduct.)
Establish standards of SiC epitaxial wafer for power devices
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Europe SiC Material and Wafer Specification TF
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4. Formation Date:
(TF formed on)
Task Force formed on:
09/28/2020
Task Force approved by Committee/GCS on:
09/28/2020
5. Comments
None.