SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 10/19/2000

Revised (if Applicable): 07/19/2001

Name of Task Force (TF): Manufacturing Equipment Safety Subcommittee

Global Technical Committee: EH&S

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
To assist the international EHS committees in managing and coordinating S2 related documents, workshops, STEPs, official interpretations, and to serve as an structure for existing and future S2 Working Groups.
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2. Scope: (Define the specific activities that the TF will conduct.)
Limitations:
* It is not within the charter of this sub-committee to review the results of technical ballots
* Existing task forces leadership continues to report directly to EHS committee
Mission:
* Manage change to SEMI S2, editorial and technical
* Serve as a forum for discussion of S2 related technical and implementation issues.
* Ensure technical content compatibility/definitions between S2 and referenced documents.
* Ensure technical content compatibility between SEMI. documents referenced in S2 or S2 auxiliary information.
* Ensure technical content compatibility with S2 of SEMI non-safety documents.
* Identify impact on S2 of non-SEMI EHS documents
* Develop and maintain library of SEMI sponsored S2 material.
* Develop and present S2 workshops.
* Equipment Safety related outreach programs
* Develop technical interpretations for EHS committee approval
* Facilitate development of S2 Aux Information
* Track changes of the International Technology Roadmap for Semiconductors (ITRS) as related to S2
* Maintain Linkage with SEMI EHS Division
* Maintain linkage with SEMATECH equipment ESH working group
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Global EHS Committee, global MESSC
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4. Formation Date:(TF formed on)

Task Force formed on: 10/19/2000
Task Force approved by Committee/GCS on:

5. Comments
None.