SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/07/2017Revised (if Applicable): 06/01/2022

Document Number: 6315
SNARF for: Revision to SEMI C30-0218, Specification for Hydrogen Peroxide, with title change to: Specification and Guide for Hydrogen Peroxide

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Chemical Analytical Methods Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The current version of SEMI C30 for Hydrogen Peroxide does not provide guidance on the levels of impurities as required by the most recent agreed upon IRDS document. This new standard will include that guidance. However, we will likely not have a company willing to validate the capability of a standard method to measure at the required levels. For this reason, we intend to convert the document to a Specification and Guide and include a Tier level in Table 3 in addition to grades.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Liquid Chemicals

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Update Table 3 with new target levels for various parameters that do not meet the current IRDS requirements and the addition of new parameters that are on the IRDS roadmap but are not currently in C30.

Update Section 16

Change title to be: Specification and Guide for Hydrogen Peroxide

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):
This document is both a Specification and Guide.
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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/28/2017b. 1st Draft by: 07/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/01/2022
e. TC Chapter Approval By:11/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
NONE

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Granted one-year extension at NA Winter 2021 Meetings (LNN)

6315 - failed TC Chapter review, NA Spring 2018
6315A - failed TC Chapter review, NA Spring 2022

Original SNARF was a Line Item ballot. Decision to re-submit SNARF for two-week TC Member review with revisions to change title and subtype from Line-Item to Major Revision at NA Spring 2022 Meetings.

Granted one-year extension at NA Spring 2022 Meetings (LNN).

6315B - failed TC Chapter review, NA Fall 2022
6315C - passed TC Chapter review with technical changes, SEMICON West 2023
RB issued Cycle 06-23

Passed A&R Cycle 10-2023
Publishing Cycle: 1223


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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 05/03/2022
Member Review End Date: 05/16/2022

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/07/2017
Recorded in TC Minutes11/07/2017

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 03/29/2022
Extension Expires on03/29/2023
SNARF Revision_C30 (rev)_distr.docSNARF Revision_C30 (rev)_distr.docSNARF Revision_C30 (rev)_distr.pdfSNARF Revision_C30 (rev)_distr.pdf