SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
New Standard:Specification of Recipe Management for LED Equipment
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
HB-LED Equipment Communication Interface
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There are three existing SEMI Standards with definitions and descriptions for recipe management during IC manufacturing. SEMI E30 includes a section for managing whole process program (recipe and other formats) body. SEMI E42 and E139 have very complicated descriptions for defining and managing the recipe as objects, which requires great effort by both equipment suppliers and IC factories.
The setting and operation of recipes in LED manufacturing are different from IC manufacturing. One LED process recipe usually takes several hours, while it takes less than twenty minutes for IC processing. Besides modifying recipe before executing, it is often required that the executing recipe be modified with the changes taking effect in subsequent steps. The recipe modification generally includes three types:
Whole recipe body updating. E30 can support this operation.
Several recipe steps updating. Currently no standard support.
Several parameters or recipe variables updating. Currently no standard support.
Each LED FAB and equipment vendor may have their own methods and using non-standard streams and/or functions to implement the requirements, which makes the communication between FAB host and equipment software difficult. So, it is necessary to have a new standard to define how to manage the recipe during LED processing. This standard can effectively prevent the different interpretations of the Wafer FAB communication standards by LED FABs and LED equipment makers. It will clarify the definitions of uncertain usage and guide the FABs and equipment makers.
b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:
LED Manufacturing and LED equipment vendors
c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The proposed new standard is Specification of Recipe Management for HB-LED Equipment. The major technical areas to be covered include:
1. Recipe level management, including upload, download, delete, list. query modification history
2. Recipe step level management, including upload, download, delete, list. query modification history
3. Recipe parameter/variable level management, including upload, download, delete, list, query modification history
b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)
For a new Subordinate Standard, identify the Primary Standard here:
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
will be issued – identify the recipient global technical committee(s):
Identify the recipient global technical committee(s):
HB-LED, Information & Control
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology is NOT required.
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
Attach Pictures and Files here: