SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 08/10/2017Revised (if Applicable):

Document Number: 6291
SNARF for: New Standard: Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Filters and Purifiers Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

As the industry becomes more sensitive to residual contamination levels on gas delivery systems, a need has developed for a more sensitive trace element test standard (using ICP-MS analytic tools) for determining amounts of trace element/metal contamination.

A trace metals contamination test method for gas delivery systems or components for the Semiconductor Industry does not exist.

Existing test methods (EDS< ESCA, Etc.) do not have the necessary sensitivity.
This activity is to convert a draft test method developed by the SCIS Gas Delivery group into a published SEMI Standard.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: substrate processing: deposition, etch

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The proposed test method will provide a repeatable procedure to extract and measure trace/metallic elements present on the wetted surfaces. The test method is specifically written for Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS) analytic equipment.

This test method will focus on components and plumbing systems typically used for gas delivery systems. Examples of components include valves, regulators, filters, and mass flow controllers. Examples of plumbing systems include tubing, weld fittings, and face seal fittings.

Acceptable metallic contamination levels will be dictated by process sensitivity or other applicable industry specifications.

This test method will differentiate from other existing (and less sensitive) test methods.

Once this standard is developed, it should be tied into F19, Table 1


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/10/2017b. 1st Draft by: 11/06/2017
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2018
e. TC Chapter Approval By:07/10/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)


b. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Modified title in version 6291A

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 09/11/2017
Member Review End Date: 09/25/2017

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS10/10/2017
Recorded in TC Minutes11/07/2017

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


Attach Pictures and Files here:
Metals_SNARF.pdfMetals_SNARF.pdf