SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/21/2017Revised (if Applicable):

Document Number: 6327
SNARF for: Revision to SEMI P45-0211, Specification For Job Deck Data Format For Mask Tools

Originating Global Technical Committee: Micropatterning
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Mask Orders Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Building a full automated flow for mask data preparation based on SEMI standards requires refined specifications for both data base files and assembly of these files on the photo mask.
Both issues are currently addressed by P44 (OASIS.MASK) and P45 (MALY) standards. While SEMI P44 is now mature and used by many companies, it seems that P45 has not yet reached the same level to be used widely:
- minor errors are still present in the specification document
- syntax is not precisely defined and may result in file parsing errors or misinterpretation
- a couple of limitations (i.e. mask size) as well as some missing information (i.e. polarity) will dramatically restrict the usage of this standard to some specific equipment

Improving file syntax description and including at least, most commonly used operations of mask writing are mandatory to make P45 a worldwide standard. The only alternative today, is to use a non supported, proprietary, de-facto standard: MEBES JobDeck.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Semiconductor industry: foundries, mask shops, equipment suppliers

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
P45 Standard basics will remain unchanged. It will be aligned and fully compliant with SEMI P44 standard.

- First step will not modify the scope of the standard (no new feature)
o File format description (BNF) will be fixed and refined to simplify the development of a writer and a reader without any risk of misinterpretation.

- Second step will enlarge the possibilities of the standard to meet all the requirements of mask writing
o Do not restrict the possible mask sizes to very few ones
o Allow the possibilty to describe some writing parameters, such as
§ polarity
§ grid
o Allow the possibility to introduce some basic geometric transformations
§ symmetry
§ rotation (orthogonal)

These extensions are not limited and should be the result of a consensus between the different committee members needs.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 01/01/2018b. 1st Draft by: 04/01/2018
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/01/2018
e. TC Chapter Approval By:07/01/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/6/2017
Member Review End Date: 12/20/2017

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/21/2017
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on