SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 12/17/2013
Revised (if Applicable):

Name of Task Force (TF): T5 Revision Task Force

Global Technical Committee: Traceability
Originating Technical Committee Region: North America


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1. Charter: (State the objective of the proposed TF.)
The objective is to add an additional option in the laser marking of 150mm and higher diameter SiC substrates in the SEMI T5 Specification document. The proposal is to add the possibility, for the substrate supplier, of making the laser mark at 9 o’clock (with the long flat at 6 o’clock) on the C-face instead of at 6 o’clock on the C-face as currently done.
The benefits of this additional option:
- Substrate users often perform their own laser marking on the Si-face, along the long flat. SiC being transparent, the marking on the C-face from the supplier and the marking on the Si-face from the user can superimpose visually, creating confusion by operators or difficulties in OCR readings;
- Having the substrate suppliers modifying the location of the laser marking at 9 o’clock will alleviate the risk of confusing the Si-face and C-face when no secondary flat is shaped in the substrate.

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2. Scope: (Define the specific activities that the TF will conduct.)
TF will evaluate the technical feasibility of changing the laser marking location at SiC substrate supplier and SiC substrate user sites. The TF will also investigate the possibility/willingness to apply this additional option to 100mm and 76mm substrates.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

GTC of Compound Semiconductor Materials should be kept informed of changes; especially the SiC TF working on the SEMI M55 document
<SiC Material and Wafer Specification TF under the Europe Compound Semiconductor Materials Committee>

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4. Formation Date:(TF formed on)

Task Force formed on: 11/28/2016
Task Force approved by Committee/GCS on: 12/02/2016

5. Comments
None.