SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5655
SNARF for: Line Item Revision of SEMI M1-1013, Specifications for Polished Single Crystal Silicon Wafers, to update 450 mm wafers edge exclusion


Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International Polished Wafers Task Force


1. Rationale: Line item change to reflect 450 mm wafers edge exclusion reduction from 2mm to 1.5mm at 16nm technology generation. This change will increase the wafer PUA.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
SEMI M1-1013 SPECIFICATIONS FOR POLISHED SINGLE CRYSTAL SILICON WAFERS


1) Table1 Silicon Wafer Specification Format for Order Entry, Parts 1 and 2

2-1 GENERAL CHARACTERISTICS

4 SETUP PARAMETERS

Current
2-1.6
Norminal Edge Exclusion

[ ] 2mm; [ ] 3mm; [ ] 5mm;
[ ] Other. (specify)__________ mm

to be modified as

2-1.6
Norminal Edge Exclusion

[ ] 1.5mm; [ ] 2mm; [ ] 3mm; [ ] 5mm;
[ ] Other. (specify)__________ mm

2)Table 9 Specified Requirements for Notched 450mm Polished Single Crystal Silicon Wafers

current
2-1.6
FQA radius
223 mm

to be modified as
2-1.6
FQA radius
223.5 mm

3) RELATED INFORMATION 1 SPECIFICATION GUIDES FOR ADVANCED TECHNOLOGY GENERATIONS

Table R1-1 Guide for the Specification of 300mm and 450mm Diameter Silicon Wafers for the 32, 22, and 16nm Technology Generations

2-1 GENERAL CHARACTERISTICS

4 SETUP PARAMETERS

Current
2-1.6 FQA radius
300mm wafers
450mm wafers

148 mm
223 mm

to be modified as

2-1.6
2-1.6 FQA radius
300mm wafers
450mm wafers

148 mm
223.5 mm


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/01/2013b. 1st Draft by: 10/01/2013
c. Preballot by: d. Technical Ballot by: 01/01/2014
e. Committee Approval By:07/01/2014




Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 10, 2013