SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 08/30/1999

Revised (if Applicable): 11/06/2007

Name of Task Force (TF): Materials of Construction of Gas Delivery Systems Task Force

Global Technical Committee: Gases

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Develop, rewrite and maintain specification & test method for evaluating for stainless steel components used in general purpose, high purity, and ultra-high purity semiconductor manufacturing applications.
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2. Scope: (Define the specific activities that the TF will conduct.)
Rewrite SEMI F19, specification for stainless steel components used in general purpose, high purity and ultra-high purity semiconductor manufacturing applications and SEMI F20 Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications.

Rewrite and update test methods for Scanning Electron Microscopy (SEM) (F72) and Auger Electron Spectroscopy (AES) Evaluation of Oxide (F73)
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.