SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
Revision to SEMI E113-0306 (Reapproved 0518), Specification for Semiconductor Processing Equipment RF Power Delivery Systems
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
Japan RF Measurement liaison Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI E113 was developed to provide standardized testing and evaluation methods that can be used to assess the performance of the RF power-delivery systems and control instrumentation on a chamber so that such systems can satisfy the RF reliability and repeatability demands. It was the intention of the original E113 to characterize not only the RF power-supply side of the subsystems (i.e., the generator, cable assemblies, matching network), but also the performance of the integrated system (i.e., entire RF circuit including RF power-delivery interface [chuck/coil] and process-chamber instrumentations).
While the original approach is more holistic and ideal for addressing issues in wafer-processing results that are predominantly caused by issues in reliability and repeatability of the process plasma, characterizing an integrated system may not be practical for subsystem suppliers and even for the plasma processing-equipment supplier as performance and stability of other subsystems, such as gas distribution/delivery subsystems, pressure-control subsystems, or chamber/components temperature-control systems, can also affect the load side of the condition in plasma-processing equipment. As a result, the scope of characterization in this Standard is often too wide to realize the reproducible testing or evaluation specified in this Standard. At the fab floor, it is very important to have judgement criteria to determine if any of the indispensable subsystems, such as the RF power-delivery subsystem, of the equipment is in good shape or not, individually.
For a complex problem that is caused by the irregularity of characteristics defined by more than one subsystem, confirming whether or not each subsystem itself is functioning/performing up to its respective specification is the basis for root-cause analysis for the problem
Based on the above-mentioned considerations, it is deemed necessary to refocus the scope of this Standard on the criteria for evaluating/testing the RF power-supply side of the RF power-delivery subsystems (i.e., the generator, cable assemblies, matching network).
It is also deemed necessary to improve the clarity of the objective, boundary conditions, and applicability of each evaluating/testing criterion in order to increase the usability of the Standard.
b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:
Semiconductor-manufacturing and similar industry sectors that use RF power for plasma processing
c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
l Refocusing scope: to provide criteria for evaluating/testing the RF power-supply side of the RF power-delivery subsystems (i.e., the generator, cable assemblies, matching network)
l Resolve inconsistencies in terminology (e.g., “RF power-delivery system” is used in many locations including the title, but is not defined, while ‘RF system’ is defined but not used except in the scope).
l Resolving inconsistencies with other Standards in the “RF Standards Suite”: While E135 addresses pulsed-power RF systems, they are excluded in E113. As the use of pulsed-power RF systems in plasma-processing equipment becomes more common, this limitation should be eliminated.
l Referencing RF power measurement completely to E136 so that adaptation to newer measurement technology is possible without revising this Standard in future.
Clarification of each measurement objective, conditions, etc.
b: Expected result of activity
Major revision to an existing Standard or Safety Guideline
For a new Subordinate Standard, identify the Primary Standard here:
Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
NA TC Chapter of Global Metrics Technical Committee
NA RF Measurement TF
will not be issued
Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology is NOT required.
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
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