SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 02/28/2017Revised (if Applicable):

Document Number: 6146
SNARF for: Line-item Revisions to SEMI E35-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment and SEMI E140-0312, Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Equipment Cost of Ownership TF
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

SEMI E35-0312 and E140-0312 are both due for their mandatory five-year reviews in 2017. Due to some of the changes affecting both SEMI 35 and E140 and/or its Various Materials Excel spreadsheet example and to comply with the Regulations and Procedure Manual, the complete set of proposed changes is being done by three independent Line-Item Letter Ballots. This SNARF for a Line-Item Letter Ballot addresses only those proposed changes that affect both SEMI 35 and E140 and/or its Various Materials Excel spreadsheet example and need to be approved simultaneously to keep the three Documents consistent with each other. These proposed changes address several portions that need of improvement to benefit the user.



b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

This revision is planned to incorporate several required updates/changes in individual line items as described below: 1) A major revision (5817A) to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight was approved during the SEMICON West 2016 meetings. The Equipment Cost of Ownership (COO) TF worked with the Physical Interfaces and Carriers (PIC) TF performing the revision to update their definition and details of “cost footprint”, with the intent to revise SEMI E35 and E140 to use this revised definition. 2) Provide additional guidance for calculating/estimating throughput per SEMI E79. 3) Provide additional guidance for calculating/estimating utilization and uptime metrics, especially for multi-path cluster tools per SEMI E10. 4) Clarify what types of engineering should be included. 5) Clarify the difference between initial training vs. ongoing training and clarify what training-related costs are included. 6) Update the definition of ‘consumable material’ to match the one in referenced SEMI E10. 7) Revise and harmonize the SEMI E35 Cost Elements section 9 with the SEMI E140 Definitions worksheet. 8) Review and edit, as necessary, to make any other miscellaneous minor technical and/or editorial changes needed, such as to add new definitions, to improve clarity, and to comply with the latest Style Manual. Note that there are no proposed changes to the equations.


b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 02/17/2017b. 1st Draft by:
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/14/2017
e. TC Chapter Approval By:07/12/2017

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Flat Panel Display (FPD) - Materials & Components, Flat Panel Display (FPD) - Metrology, HB-LED, MEMS / NEMS, Photovoltaic
___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
A corresponding revision to SEMI E140 is planned to be conducted in parallel with this revision.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/07/22016.
Member Review End Date: 12/22/2016.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS02/16/2017
Recorded in TC Minutes

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on