SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: Revised (if Applicable):

Document Number: 4966
SNARF for: Creating a Mapping of SEMI S2 to the Machinery Directive

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: S2 to Machinery Directive Mapping Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Conformance to the Machinery Directive is an EU market entry requirement for most semiconductor and photovoltaic* manufacturing equipment. Additionally, many equipment end users require Machinery Directive conformance for equipment going into regions other than the EU.
Where a company typically must do S2 and Machinery Directive assessments, S2 is typically the higher priority as it must (by custom) be done by a third party, and S2 has more specific criteria than the MD.
Such companies often then use their S2 report as the basis for declaring conformance to much of the MD Annex I criteria.
However, there is no industry accepted mapping of current S2 criteria into the MD Annex I criteria, so each company pursuing this route must argue their mapping alone.

*It was reported in the interest group meeting that S2 is or may be used to qualify some photovoltaic equipment.

b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Creation of an RI to S2, or an AI, to provide an informative mapping of S2 paragraphs onto Machinery Directive Annex I (essentially health and safety requirements) paragraphs typically relevant to equipment in the semi/photovoltaic industries (e.g. probably not the Annex I section related to underground mining equipment) and perhaps additional commentary on what might be missing if an S2 paragraph is found to partly, but not completely address an MD Annex I paragraph.

b: Expected result of activity
New Auxiliary Information

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/01/2010b. 1st Draft by: 10/01/2010
c. (Optional) Informational Ballot by: 12/01/2010d. Letter Ballot by: 04/01/2011
e. TC Chapter Approval By:07/30/2011

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS04/01/2010
Recorded in TC Minutes
Attach Pictures and Files here: