SEMI International Standards
Date Prepared: 04/13/2012
Revised (if Applicable): 12/07/2012

Name of Task Force (TF): 450 mm AMHS Task Force

Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
For 300mm fabs, different device makers (DMs) have different signal tower specifications for AMHS
devices. Sometimes, even one DM has different specifications per fab. Basically, discussions to fix
specifications have been required on a case-by-case basis.

DMs occasionally provide their signal tower specifications as common specifications. Most of
them are prepared for production devices and not applicable to AMHS devices.

2. Scope: (Define the specific activities that the TF will conduct.)
Standardize Factory interface for 450mm AMHS devices to be delivered to fabs, such as Signal Tower
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

450 mm IPIC TF under global PIC Committee
Global I&C Committee

4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on: