SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5676
SNARF for: Line Item Revisions to SEMI E83-0413, Specification for PGV Mechanical Docking Flange

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: Because weight of PGV increased for 450mm, it revise a precondition.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
R1-10 The docking flange should sustain docking impact for the lifetime of the flange without any performance degradation.
Assume 300mm:90kg (200lb), 450mm:120kg (265lb) PGV moving at 0.3m/s (1ft/sec)
Assume 250,000 docking cycles within a flange lifetime
Recommended to design for 3x safety factor for single docking cycle
Note: this PGV mass referenced here assumes a 450mm FOUP or MAC. PGVs designed for different payloads will have a different mass and the design of the docking flange should be adjusted if needed.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/09/2013b. 1st Draft by: 10/29/2013
c. Preballot by: d. Technical Ballot by: 01/03/2014
e. Committee Approval By:04/02/2014

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 30, 2013