SEMI International Standards
Date Prepared: 04/12/2017
Revised (if Applicable): 11/09/2017

Name of Task Force (TF): S3 Revision Task Force

Global Technical Committee: EH&S
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)
Revision SEMI S3, Safety Guideline for Process Liquid Heating Systems, including:
a) expansion of the scope to include systems for heating liquid and solid process chemicals that are delivered as gases to substrates,
b) incorporation of appropriate industry learning and experience from the use of S3 or the equipment to which it pertains, and
c) correction of errors, if any, that are indentified during the TF’s work.
d) Modification of S3 invoking reference in S2

2. Scope: (Define the specific activities that the TF will conduct.)
Meet via telecon and corporeally
Prepare and submit technical ballots
Prepare ballot responses for adjudication by the NA EHS TC

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

4. Formation Date:(TF formed on)

Task Force formed on: 04/06/2017
Task Force approved by Committee/GCS on: 04/06/2017