SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
New Standard – Specification for Equipment and Materials Part Traceability
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
Equipment and Materials Traceability Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Information about parts (Equipment and Materials) need to be shared with an IDM for and traceability and verification. (For example, material handling, safety, compliance, and authenticity). Parts include hardware components (like pumps, valves, etc) and consumables (such as gases, resist, etc). Suppliers need to submit this information to the IDM before the items arrive at a customer site, the customer needs to ensure the items they receive are correct and they have the proper paperwork before it is accepted and used. Once it is in the customer’s system, they may want to track additional information about the part as it is consumed and used in the manufacturing process.
There is currently no standard way of defining and sharing this information.
• Each IDM have different information they require for the various types of parts.
• Each supplier and sub-suppliers provide information in their own format, or not at all.
This leads to companies developing their own way of providing information and it is very difficult to provide traceability of the various pieces involved.
b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:
Anyone involved with Semiconductor component, instruments and sub-systems as a customer or supplier
c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This proposal suggests to create a new Standard to define information about a part (Equipment and Materials) so it can be tracked throughout a customer site.
It will define a minimum set of information common for each part (for example Part Name, Category, Part Number, Serial Number), and also information appropriate to major part classifications (for example different information will be relevant to gases, valves, gaskets, pumps, etc.)
The information format will be designed so it can be extended by IDMs, Customers and Suppliers to capture internal information that will not be made available to external consumers.
This standard will document information about a part. Technology specific implementation details can be captured in separate documents, and will be covered by separate SNARFs (for example formatting the information in XML, or how information can be shared between two parties)
b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)
For a new Subordinate Standard, identify the Primary Standard here:
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Japan Chapter of Traceability TC
will not be issued
Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology is NOT required.
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
took place between (put dates below) before approval by the GCS, or
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
Attach Pictures and Files here: