SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 07/13/2011

Revised (if Applicable):

Name of Task Force (TF): Sensor Bus Task Force

Global Technical Committee: Information & Control

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
The Sensor Bus Task Force is to draft a set of standards documents specifying a sensor bus for networked communications among components within semiconductor processing equipment. The standard will specify the connection, communication, and behavior for applicable types of sensors, actuators and controllers providing a standard platform for interconnecting these devices in an open systems environment.
These standards should permit sensors or actuators from one supplier to be substituted for another supplier=s similar device without loss of basic functionality. Sufficient flexibility should be provided within the standards for manufacturer specific functions and to allow for the evolution of control technologies. Existing communication standards, perhaps from other industries, should be utilized wherever practical. Documents should be structured to facilitate the future definition of additional devices as well as other communication technologies without affecting the remaining specifications.
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2. Scope: (Define the specific activities that the TF will conduct.)
The SEMI Sensor Bus Standard should define physical connections at the devices, electrical signal levels, data rate, network structure, logical protocols, device application models and standard data types.
The standard should establish a common set of behaviors and communication protocols to which smart sensors, actuators and control systems must conform, in order to operate within a well defined advanced distributed intelligence environment. These components include, but are not limited to, switches, valves, thermocouples, transducers, mass flow controllers, vacuum pumps, spectrometers, particle counters, residual gas analyzers and process controllers.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 07/13/2011
Task Force approved by Committee/GCS on: 07/13/2011

5. Comments
The original Sensor Actuator Bus Subcommittee TFOF was created in 09/12/1995 and was revised in 10/27/1998. On July 13, 2011, the Sensor Actuator Bus Subcommittee was rechartered as the Sensor Bus Task Force in response to new SEMI Regulations requiring ballots are only developed by task forces.
All open SNARFs will be transferred under the Sensor Bus Task Force.