SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5463
SNARF for: Revision to SEMI E83-1106, Specification for 300 mm PGV Mechanical Docking Flange with title change to: Specification for PGV Mechanical Docking Flange

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: Although ISMI Guidelines call for use of an E83 compliant PGV docking flange for 450mm, the actual E83 standard is titled “Specification for 300mm PGV mechanical docking flange”. There is a need to update to the standard both to align the standard with ISMI guidelines by making E83 valid for multiple wafer sizes and loadport types.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Wording changes so that, per scope of the standard, the PGV flange described in the standard can be used for both 300mm and 450mm wafer sizes. Include D16 dimensions as needed to specify the position of the flange for 450mm loadports (FOUP and tape frame). Scope does not include changes to the dimensions of the docking flange itself.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2012b. 1st Draft by: 07/01/2012
c. Preballot by: d. Technical Ballot by: 08/29/2012
e. Committee Approval By:10/31/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 11, 2012