SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 09/20/1999

Revised (if Applicable): 09/20/1999

Name of Task Force (TF): Diaphragm Valves Task Force

Global Technical Committee: Liquid Chemicals

Originating Technical Committee Region: Japan

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1. Charter: (State the objective of the proposed TF.)
To develop the consensus-based specifications for diaphragm valves' base plate used fo rthe liquid chemical distribution systems in the semiconductor manufacturing industry.
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2. Scope: (Define the specific activities that the TF will conduct.)
Tge task force will focus on those areas related to the diaphragm valve specifications used for the LCDS in the semiconductor manufacturing industry.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.