SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 08/21/2020Revised (if Applicable):

Document Number: 6678
SNARF for: Revision to SEMI E10-0814E: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The reason for this SNARF is to perform the mandatory 5-year review of SEMI E10-0814E. While the document is in review and revision, the TF will address a number of open items collected over the last few years as listed below in the scope section.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Semiconductor manufacturers and semiconductor equipment suppliers, semiconductor software providers

c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus is difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
(1) Perform mandatory 5-year review. The TF plans to include the following:
A. Regulations, Procedure Manual, and Style Manual required updates
B. Clarifications and editorial modifications as necessary
C. Mutual exclusivity of states
D. Unscheduled Downtime State (UDT) definition correction/clarification
E. Handling of predictive maintenance conditions (turning some unscheduled downtime to schedule downtime)
F. RAM and utilization metrics for subsystems that do not relate directly to processing units (e.g., RF generators, power delivery systems)
G. New “category” of RAM metrics beyond the current time-based and cycle-based metrics for other “work factors (e.g., pulse counts for pulse-based excimer lasers in exposure equipment)
H. Update Appendix 2 to allow additional Reliability Growth/Degradation models
I. Address applying E10 to AMHS equipment
J. Investigate incorporating Advanced Notice models for scheduled maintenance

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2018b. 1st Draft by: 04/01/2019
c. (Optional) Informational Ballot by: d. Letter Ballot by: 11/01/2019
e. TC Chapter Approval By:11/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
Photovoltaic (PV), MEMS / NEMS, Flat Panel Display (FPD) - Materials & Components, HB-LED, Information & Control, Physical Interfaces & Carriers

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Flat Panel Display (FPD) - Materials & Components, HB-LED, Information & Control, MEMS / NEMS, Photovoltaic, Physical Interfaces & Carriers
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
This is a new SNARF to replace a prior activity (SNARF 6578). That Letter Ballot is planned to fail at the Japan Metrics TC Chapter meeting in Sept. after transfer from North America Metrics TC Chapter as meetings have been cancelled due to the COVID-19 pandemic. Some additional changes have been added to the scope based on the feedback received from the original letter ballot.

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8. TC Member Review:


Member Review Start Date; 09/09/2020
Member Review End Date: 09/10/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/10/2020
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on