SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5624
SNARF for: Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Changes related to representative sampling

Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: S2 Chemical Exposure Task Force

1. Rationale: Section 23.5 does not currently include any guidance to define what representative conditions are required when conducting IH air sampling to determine conformance to OEL / LFL levels. Activity maybe to add a section to S2 section 23 and/or possibly develop an Appendix. This issue is increasing in significance as opportunities to establish representative conditions at equipment supplier facilities in order to perform baseline air sampling are more and more difficult.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Defining / developing guidance for what conditions are needed in order for the air sampling to be accepted as representative to than apply the data and determine conformance.

S3, S6, S18, and S25 may also be affected and, therefore, related changes may also be included in this ballot.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/01/2013b. 1st Draft by: 07/01/2013
c. Preballot by: d. Technical Ballot by: 07/01/2014
e. Committee Approval By:10/01/2014

Safety Considerations:
The resulting document is expected to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 11, 2013