SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 09/11/2008
Revised (if Applicable):

Name of Task Force (TF): Cycle Time Metrics Task Force

Global Technical Committee: Metrics
Originating Technical Committee Region: Japan


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1. Charter: (State the objective of the proposed TF.)
Up to now, various improvement activities are well considered and carried out in Wafer FAB of semiconductor industry, and the productivity has been improved every day. However the improvement of the further productivity such as 50% reduction of the cycle time is recently required. In the semiconductor industry, there are not common definitions for “Process time/Waiting Time” which are the important factors to discuss about the cycle time. The first purpose of this Task Force is to define the states “Process time/Waiting Time” and the associated events to generate these states. These definitions include the states "Process time / Waiting time" in tool as a task force scope.

"Waiting time" extracted from the cycle time analysis depends on the state of the associated resource and FAB operation. In order to reduce the cycle time, the second purpose of this Task Force is to define the states, the associated events and the associated transition between states of the resource and FAB operations which are the cause of “Waiting Time”

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2. Scope: (Define the specific activities that the TF will conduct.)
The scope of the cycle time to be discussed in the CMT Task Force is the product cycle time in Wafer Mfg shown in figure below. In order to reduce the production cycle time in Wafer Mfg, "Process time / waiting time" shall be defined. In addition to this definition, the states, the events and the transition for production, FAB operation and resource shall be defined.
> The states, associated events and transition between events for Production
> The states, associated events and transition between events for FAB operation
> The states, associated events and transition between events for the FAB resources (including the resource inside the production tool such as chamber and etc.)
In addition, the Key Performance Index to monitor cycle time and FAB productivity shall be defined.

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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
CTM task forces in any region of worldwide SEMI
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4. Formation Date:(TF formed on)

Task Force formed on: 09/11/2008
Task Force approved by Committee/GCS on: 09/11/2008

5. Comments
None.