SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/23/2021Revised (if Applicable): 07/12/2023

Document Number: 6896
SNARF for: New Standard: Specification for 300 mm Frame Carrier FOUP

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Film Frame FOUP (FFF) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI E185 and E184 define requirements for a Tape Frame FOUP and Tape Frame FOUP Load Port, but only with options for a 10mm pitch / 25 capacity or 20 mm pitch / 13 capacity. The SEMI E184 Load port is incompatible with BOLTS/SEMI E63. A smaller, more lightweight enclosed carrier sized for 10mm pitch / 13 capacity is required to provide compatibility with existing AMHS and equipment designs.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Assembly / packaging factories and equipment

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The TF will focus on creating a standard for a small footprint, low weight FOUP that can accommodate 300mm tape frames. The scope will include, but is not necessarily limited to the following boundary conditions:
- 10mm pitch
- 13 wafer frame capacity
- sized so that the FOUP LP can be compatible with a 300mm BOLTS compatible load port
copy / reuse as much of the existing 300mm carrier standards as possible

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/08/2021b. 1st Draft by: 07/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2022
e. TC Chapter Approval By:11/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Japan PIC, Tape Frame FOUP WG
3D Packaging and Integration Global Technical Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
None

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
3D Packaging and Integration
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Original TF Packaging Tape Frame Handling TF was updated at SEMICON West 2023 to FFF TF (LNN)

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 11/23/2021
Member Review End Date: 12/06/2021

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/08/2021
Recorded in TC Minutes12/08/2021

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF_FC FOUP (new)_atm.docSNARF_FC FOUP (new)_atm.doc