SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared:

Revised (if Applicable):

Name of Task Force (TF): International Reticle SMIF Pod and Load Port Interoperability Task Force

Global Technical Committee: Physical Interfaces & Carriers

Originating Technical Committee Region: International

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1. Charter: (State the objective of the proposed TF.)
The task force will work on reticle SMIF pod and related LP standards to specify:
(1) Carrier Placement Sensing Pad locations, sizes and heights
(2) Info Pad for lockout features locations, sizes and heights
(3) Ports (e.g. used for purging) – locations, sizes
Furthermore, the task force will review the referenced documents of the LP and pod standards – a recent ballot comment has revealed missing or outdated references in the document.

It is the goal of the TF to make as small changes as possible to limit the impact of any of the changes for the industry. The intent is to affect future implementations, not existing implementations.
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2. Scope: (Define the specific activities that the TF will conduct.)
The TF will work on the following documents:
E100, E111, E112, E117, E19.3 to address the challenges described above.

To minimize impact to industry, TF will consider adding as appendices or RI sections as alternative to adding in main body.

Note that this does NOT include EUV reticle carriers.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Micropatterning Committee
European Automation Committee
JA PIC Committee
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4. Formation Date:(TF formed on)

Task Force formed on: 07/14/2010
Task Force approved by Committee/GCS on:

5. Comments
None.