SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5493
SNARF for: New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)

Originating Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: Precursor Specifications Task Force

1. Rationale: All chip manufacturers who follow generally accepted roadmap strategies cannot avoid the use of materials, including precursors for thin film deposition. The customer will gain the confidence of using new materials whose characteristic properties have been identified and quantified. Although small in volume, precursors are functionally important to an efficient and consistent manufacturing process with consequent benefits to the ROI.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The task force will address the identification and quantification of nano-particulate, molecular and elemental impurities/contaminants in precursors employed to create thin films of: Low K, High K, diffusion barriers and metallization. The aim is to provide a common standard around which vendors can build their proprietary position. The task force will commence by collating and monitoring SEMI and public domain specifications, then prioritize molecules for specification drafting.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/10/2012b. 1st Draft by: 01/02/2013
c. Preballot by: d. Technical Ballot by: 01/05/2013
e. Committee Approval By:10/01/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 10, 2012