SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5468
SNARF for: New Standard: Mechanical Interface Specification for 150 mm HB-LED Load Port

Originating Global Technical Committee: HB-LED
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: HB-LED Equipment Automation Interfaces

1. Rationale: Sapphire substrates used in HB-LED processing are sized such that a new mechanical interface for equipment is needed.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The purpose of this activity is to define the basic interface dimensions of a load port and their arrangements on HB-LED manufacturing equipment, where HB-LED 150mm cassettes can be loaded and unloaded.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/12/2012b. 1st Draft by: 01/11/2012
c. Preballot by: d. Technical Ballot by: 01/03/2013
e. Committee Approval By:07/12/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 12, 2012