SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 07/08/2003

Revised (if Applicable):

Name of Task Force (TF): Process Control Solutions (PCS)

Global Technical Committee: Information & Control

Originating Technical Committee Region: Europe

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1. Charter: (State the objective of the proposed TF.)
As specified in the charter of NA-PCS-TF. To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities.
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2. Scope: (Define the specific activities that the TF will conduct.)
Liaison TF to NA-PCS-TF.
- to bring the requirements of European companies into the Standardization Process
- to review the recommended approach
- to keep people informed and collect and provide feedback.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
North America PCS TF
Japan PCS TF
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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.