SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/01/2020Revised (if Applicable):

Document Number: 6691
SNARF for: New Standard: Test Method of Sheet Resistance for Flexible Hybrid Electronics

Originating Global Technical Committee: Flexible Hybrid Electronics (FHE)
Originating TC Chapter: Taiwan
Task Force (TF) in which work is to be carried out: FHE System for Wearable Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Development of soft-dry sensing electrodes (such as textile-based type) and motion sensors is one of the main topics of recent smart textile research, because personal health care is a growing global interest. Where, the sensing electrodes are an important configuration for the circuit layout and signal processing, and the sensing electrodes are applied in the flexible hybrid electronics for transmitting the signal. The sheet resistance measurement is an important test method for ensuring the sensing electrode quality in in-coming quality control and out-going quality control, and improving further the productivity and efficiency.

Nowadays there are standards for measuring the sheet resistance and the flexible hybrid electronics. It is defined the sheet resistance on silicon wafer in SEMI 84-1105[1] and ASTM F76-08[2], which used the measurements of four-point probe and Van der Pauw method respectively. Furthermore, IPC-8921[3] defined the four-point probe to measure the sheet resistance for woven and knitted material, and IPC-TM-650[4] and AATCC TM 76[5] used the concentric ring probe technique to measure the sheet resistance for dielectric material.
However, textiles show different electrical properties in different directions, in other words, they are anisotropic. Ilda Kazani [6] presented that Van der Pauw method has more consistent result to detect the electrical anisotropy than the four point probe method. In this SNARF, unlike the past methods, Van der Pauw method is proposed to measure the anisotropic sheet resistance of the specific fabric material for flexible hybrid electronics

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: This SNARF can be applied in wearable industries for flexible electronic development, testing and quality assurance.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. This document recommends a test method of the sheet resistance for flexible hybrid electronics, by applying the Van der Pauw method in the specific electrode materials. The document will focus on defining the measurement, procedure, the electrode materials, evaluation and report.
2. The document applies to the specific fabric material and intended for woven material.
3. The document includes procedures for checking the electrically measured apparatus such as current source, multi-meter etc.
4. ASTM D1776 [7] standard has defined for conditioning and testing textiles. This test method is designed for measurements at standard conditions of (232) C and (505) % relative humidity.
5. The Van der Pauw method covers the measurement of sheet resistance of textile. Firstly, the specimen is arranged on insulated surface and connected the copper electrodes to the four edges of the specimen. Use the current source to measure the two directions voltage, and the sheet resistance of the specimen would be calculated. The measurement range of sheet resistance is less than 1 .
6. This test method is intended to use square specimens, size of 10 cm*10 cm.
7. This document does not purport to address safety issues, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health guides and determine the applicability of regulatory or other limitations prior to use.

[1] SEMI 84-1105. Standard Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe.
[2] ASTM F76-08 2016. Standard Test Methods for Measuring Resistivity and Hall Coefficient and Determining Hall Mobility in Single-Crystal Semiconductors
[3] IPC-8921 2019 Requirements for Woven and Knitted Electronic Textiles (E-Textiles) Integrated with Conductive Fibers, Conductive Yarns and/or Wires.
[4] IPC TM 650 Test Methods Manual.
[5] AATCC TM 76 2005. Electrical Surface Resistivity of Fabrics.
[6] Van Der Pauw method for measuring resistivities of anisotropic layers printed on textile substrates In Textile Research Journal, Volume 81(20), p 2117-2124, 2011
[7] ASTM D1776 2004. Standard Practice for Conditioning and Testing Textiles.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/06/2020b. 1st Draft by: 12/30/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/31/2021
e. TC Chapter Approval By:03/31/2021

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Since this TC is the first of its kind under SEMI global standards organization, currently there is no TC in other region associated with this TC.

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):
There are several SDOs this TF may liaison with for potential collaboration in the future, such as JEDEC, ASTM, IEC, IPC, AATCC, TSTA…etc.

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 09/15/2020.
Member Review End Date: 10/30/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS11/02/2020
Recorded in TC Minutes


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here:

SNARF_Test Method of Sheet Resistance for FHE.pdfSNARF_Test Method of Sheet Resistance for FHE.pdf