SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared: 07/12/2016
Revised (if Applicable):

Name of Task Force (TF): Power Grid Harmonics Task Force

Global Technical Committee: Facilities
Originating Technical Committee Region: North America


_____________________________________________________________________________
1. Charter: (State the objective of the proposed TF.)
Enhance the mutual compatibility of fab power grids and tools with respect to harmonics on the 50/60 Hz fab power grid.
_____________________________________________________________________________
2. Scope: (Define the specific activities that the TF will conduct.)
On 50/60 Hz fab electric power grids, enhance compatibility between tools and fab electric power grids with respect to voltage harmonics, current harmonics, and harmonic impedances by:
Establishing clear, precise communication methods between tool suppliers and fab electric grid operators
Setting limits, test methods, and compliance verification, as required.

_____________________________________________________________________________
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Link to SEMI F47 (voltage dip immunity) Task Force.
_____________________________________________________________________________
4. Formation Date:(TF formed on)

Task Force formed on: 07/12/2016
Task Force approved by Committee/GCS on: 07/12/2016

5. Comments
None.