SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Revised (if Applicable):
Name of Task Force (TF):
Power Grid Harmonics Task Force
Global Technical Committee:
Originating Technical Committee Region:
(State the objective of the proposed TF.)
Enhance the mutual compatibility of fab power grids and tools with respect to harmonics on the 50/60 Hz fab power grid.
(Define the specific activities that the TF will conduct.)
On 50/60 Hz fab electric power grids, enhance compatibility between tools and fab electric power grids with respect to voltage harmonics, current harmonics, and harmonic impedances by:
· Establishing clear, precise communication methods between tool suppliers and fab electric grid operators
· Setting limits, test methods, and compliance verification, as required.
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Link to SEMI F47 (voltage dip immunity) Task Force.
4. Formation Date:
(TF formed on)
Task Force formed on:
Task Force approved by Committee/GCS on: