SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 09/07/2000

Revised (if Applicable):

Name of Task Force (TF): F1 Revision TF

Global Technical Committee: Facilities

Originating Technical Committee Region: Japan

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1. Charter: (State the objective of the proposed TF.)
New task force will revise SEMI F1-96.
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2. Scope: (Define the specific activities that the TF will conduct.)
This task force will reexamine and revise the leak specification for gas supply systems, sub-systems, and components.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 09/07/2000
Task Force approved by Committee/GCS on:

5. Comments
None.