SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/16/2015Revised (if Applicable):

Document Number: 5917
SNARF for: Line Item Revisions to SEMI S8, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Addition of reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ergonomics Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There are areas within the current S8 document that need clarification or expansion. Some of these include:

1. Better define scope of operations, maintenance and service tasks to be assessed.
2. Definition for defining the hand-object coupling point so consistent analysis can be achieved.
3. Display heights guidance is outdated and needs to be updated to address the advances of technology in display technologies, formats and size.
4. Guidance on how to assess rotational knob torques needs development.
5. Guidance on hand access clearances needs to be refreshed and improved.
6. Guidance on toe clearance, once in the document, but now somehow absent, needs to be replaced.
7. Develop guidance on hand crank design and use, which has been requested for several years.
8. Improve and expand guidance concerning load port heights. Currently, the document only addresses wafer cassettes.
9. Explore/develop guidance for other areas of industry (A/T related equipment) which use other types of device carriers (JEDEC trays, lead frame cassettes, ring carriers, etc…).
10. Explore/develop guidance for the handling of items without handles since a supplier can avoid the handle design criteria in Section 6 by not using handles at all, which is not in the spirit of the SEMI-S8.
11. Explore/develop risk assessment guidance for non-compliant design criteria to aid equipment evaluators with completing consistent risk assessments.

Create a new Related Information section with details on how those guidelines that were not taken directly from their original sources were developed (for example, enclosed handle criteria). This will assist with any future revisions of the document and should help to reinforce the credibility of SEMI-S8.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Better define scope of operations, maintenance and service tasks to be assessed.
2. Improvements to SEMI-S8 Appendix 1 SESC including:
a. Revise service criteria to be more “precise”
b. Hand-object coupling point definition
c. Display height criteria revisions
d. Load port heights for things other than cassettes
e. JEDEC trays, lead frame cassettes, ring carriers, etc…
f. Rotational control knobs (almost complete)
g. Hand access clearance (almost complete)
h. Toe clearance
i. Hand cranks
j. Criteria for items without handles that are handled manually.
3. Add references to assist non-ergonomist with application of the material handing tools referenced in SEMI-S8 Appendix 2.
a. Areas of the current structure of S8 that will be affected:
i. SEMI S8 Section 8: Related Documents
ii. SEMI S8 Appendix 2 - Lifting, Strength, and Materials Handling
4. New Related Information Section with risk assessment guidance for non-compliant design criteria.

New Related Information section with details on how certain guidelines that were were developed (for example, enclosed handle criteria).

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/16/2015b. 1st Draft by: 12/31/2015
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/15/2016
e. TC Chapter Approval By:03/30/2016

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
MESSC

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/16/2015
Recorded in TC Minutes07/16/2015

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on