TFOF for S13 Revision Task Force
SEMI International Standards
Date Prepared: 12/07/2001
Revised (if Applicable):

Name of Task Force (TF): S13 Revision Task Force

Global Technical Committee: EH&S
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
This Task Force revises existing S13 and prepare a draft document. After balloting, the Task Force reviews the validity of the document based on the comments from global voters.
2. Scope: (Define the specific activities that the TF will conduct.)
1. Reconsider the Scope and the each description of the existing document.
2. Reconsider the Title -- if other manual such as installation manual should be addressed in this document.
3. Application to FPD manufacturing equipment may be considered in this document.
4. Harmonize with other SEMI documents such as S2-0200, S8-0701, S14-0200.
5. Descriptions to be added.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Currently, none. We hope NA would build up a support task force.
4. Formation Date:(TF formed on)

Task Force formed on: 12/07/2001
Task Force approved by Committee/GCS on: