SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
Line Item to SEMI F32-0211, Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
Materials of Construction of Gas Delivery Systems Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Document 6109 was issued for Reapproval Ballot to satisfy the five-year review in Cycle 9, 2016. Comments were received from the Reapproval Ballot, which required failing of the Document. SNARF 6109 was abolished at the Spring 2018 meetings, and this new SNARF issued to incorporate and address the negatives and comments that were receive.
b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:
c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Address the negatives as follows:
-Eric Sklar of Safety Guru rejected the document for five (5) negatives. Reviewed the negative with the TF. SG01, SG02, SG03, and SG04 were deemed editorial in nature and can be addressed by SEMI during release. SG05 Section 5.2.2 will be reviewed from a technical standpoint. It is proposed that the changes will be a line item ballot.
Matt Milburn of UCT presented the following:
1. Investigate the layout of the test set up. Matt believes that the test set up cannot be accomplished as shown in the existing revision.
2. Investigate temperature influence and add establish temperature testing parameters
3. Not applicable for IGS components
Joyce Chen of UCT
Equation as presented in the document is incorrect versus the ANSI equation.
b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline
For a new Subordinate Standard, identify the Primary Standard here:
Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
will not be issued
Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
is not required for this SNARF.
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
Attach Pictures and Files here:
SNARF_F32_Line Item Revion_v1_LN.doc