SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/03/2010

Revised (if Applicable): 07/22/2010

Name of Task Force (TF): Filters and Purifiers Task Force

Global Technical Committee: Gases

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Utilizing existing SEMATECH and SEMI documents to develop standardized gas filter test methods for flow/pressure drop curves and particle contribution.
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2. Scope: (Define the specific activities that the TF will conduct.)
The activity would form a task force to review existing documents and data in order to develop industry-specific test methods for gas distribution system filters.
The existing SEMI Particle Test Methods for gas filters should be reviewed and change the designation of these documents to F (facilities) or E (equipment) should be considered.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.