SNARF for Doc 5947

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 06/17/2015

Revised (if Applicable):

Document Number: 5947
SNARF for: Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. New Scope and Small Changes

Originating Global Technical Committee: EH&S

Originating TC Chapter: International

Task Force (TF) in which work is to be carried out: S23 Revision Global Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

1.) The TF has come to understand that equipment efficiency improvements may be more practicable than overall equipment energy reduction and would like to provide guidance for this topic in S23, and are advised by Japan TC that providing efficiency guidance requires a scope change because ‘energy efficiency’ is not quite the same a ‘energy conservation’. 2) The TF has prepared guidance on energy efficiency improvements for S23 section 12 and would like to ballot that guidance. 3) Efforts in the ESEC TF to create a subsystem ‘sleep mode’ communications protocol drive a need to better define and describe subsystems in S23.

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

1.) The scope of S23 will be modified to include ‘energy efficiency’ (meaning a concept of energy used per unit of achieved work and which implies a conservation of energy), and related changes will be made throughout the document where ‘conservation’ is currently used, as needed.
2.) Guidance will be provided related to the point that if the productive efficiency of a tool is increased at a greater ratio than the related rise in energy consumption, it can be beneficial to the overall energy conservation goal.
3.) Some definitions related to subsystems and text explain how subsystems relate to main equipment.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

For revision of existing Standard(s) or Safety Guideline(s), identify the Standard(s) or Safety Guideline(s) that are to be revised here: _ S23_, and identify which parts of the Standard(s) or Safety Guideline(s) that are to be revised. (Check all that apply.)

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 10/01/2015	b. 1st Draft by: 10/01/2015
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 10/01/2015
e. TC Chapter Approval By:10/01/2016

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)

S23 TS is a Global TF with connections to JP and NA EHS TC Chapters.
EHS Japan Chapter and NA Chapter
Global I&C Tecchical Committee (intercommittee ballot)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Information & Control
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

will include reproduced copyrighted material

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
published as 1216, closed

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 2015/08/07
Member Review End Date: 1015/08/21

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	09/24/2015
Recorded in TC Minutes

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

Reporduces Comyrighted Materials SEAJ.pdf