SEMI International Standards
Date Prepared: 11/02/2009
Revised (if Applicable):

Name of Task Force (TF): MEMS Reliability

Global Technical Committee: MEMS / NEMS
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)

This task force provides standards and guides to achieve reliable processes and high quality MEMS products, by standardizing and testing a set of process conditions to achieve reliable fabrication of basic MEMS structures.

2. Scope: (Define the specific activities that the TF will conduct.)

The task force in its time line will outline the selection of a structure, the steps for process, materials and machines and parameters governing process reliability and end reproducibility. It will also outline reliability test and quality check details and recommend the guideline to achieve high quality process for MEMS structures.

The task force will decide the technology timeline to achieve sets of guidelines and standards for several MEMS structures.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

The task force has not started communication with other task forces

4. Formation Date:(TF formed on)

Task Force formed on: 11/02/2009
Task Force approved by Committee/GCS on: 11/02/2009