SEMI International Standards
Date Prepared: 09/29/2010
Revised (if Applicable):

Name of Task Force (TF): Liquid Filter Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
Develop a standard of mono-dispersed polystyrene latex (PSL) challenge test for liquid filter.
2. Scope: (Define the specific activities that the TF will conduct.)
To develop a PSL particle challenge test method for liquid filter.
Define a test condition for PSL challenge test.

The following areas are to be addressed:
Determine the test condition such as fluid, flow rate, pressure, PSL concentration, membrane treatment, etc.
Determine the type of filter evaluated.
Determine the type of PSL (reference material)
Determine the method of membrane treatment prior to the test for decreasing the adsorbing effect
Determine the description of the test result

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

4. Formation Date:(TF formed on)

Task Force formed on: 09/29/2010
Task Force approved by Committee/GCS on: 09/29/2010