SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/13/2023Revised (if Applicable):

Document Number: 7134
SNARF for: Revision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of
Semiconductor Manufacturing Equipment

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ergonomics Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The proposed technical changes are distributed widely throughout SEMI S8. The Task Force agrees that grouping items to conform to the 10 Line Item limit would result in an overly complex ballot that would be confusing and difficult to review.


b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:
1.Companies that manufacture equipment with features that do not meet new guideline criteria.
2. Third party assessors (would need to learn new criteria and assess new items).

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Limit scope to “5-year” components.

2. Miscellaneous edits to:
a. Conform with the with the SEMI Style Manual
b. Improve text for clarity
c. Change text to be technically correct

3. Provide material handling assessment guidance
a. Add instructions for performing assessments and evaluating risk
b. Add instructions on how to use the NIOSH lifting equation
c. Add psychophysical data and instructions for use
d. Remove wafer cassette rotation device sections 5.1-5.2 because this information would be covered by the
new material handling criteria.

4. Update controls section to allow for various postures
5. Change “operation” “maintenance”, and “service” task-based descriptors to frequency-based descriptors of “frequent”, “infrequent”, and “very infrequent” throughout the document.
6. Change cleanroom glove strength discounting factors from 15% to 10% in all instances
7. Change assessment documentation criteria to be consistent SEMI S2 and place documentation expectations within the SESC Checklist.
8. Update data in Related Information 1: Anthropometric Resource Data.

9. Changes to various parts of the SESC Checklist, including:
a. Edits to improve clarity
b. Add walking surface criteria
c. Add information about “ergonomic access considerations”
d. Add dimensional criteria for lying down on one’s side
e. Provide details on alignment and holing aids

10. Delete Related Information 4: Hazards, Alerts and Alarms because the Task Force believes this information belongs in SEMI S2.
11. Add manual hand crank criteria.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 01/01/2022b. 1st Draft by: 08/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2023
e. TC Chapter Approval By:07/01/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 07/17/2023.
Member Review End Date: 07/31/2023.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS08/11/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on