SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/30/2022Revised (if Applicable):

Document Number: 6923
SNARF for: Line Item Revisions to SEMI E167-1213: Specification for Equipment Energy Saving Mode Communications (EESM), SEMI E167.1-1213: Specification for SECS-II Protocol for Equipment Energy Saving Mode Communications, and SEMI E175-1116: Specification for Subsystem Energy Saving Mode Communication (SESMC)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Energy Saving Equipment Communication Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
• Situation: The original standard (SEMI E167) has been written with the intention of an energy saving solution. Communication was planned to be tool specific, but actually a more reasonable approach would be to have it chamber specific, since most subfab components such as dry pumps are chamber specific and even tool specific components such as local abatement have chamber specific features
• Therefore, the standard needs to be updated with the intention that either the tool or the chamber can go into sleep mode
• Task force will review the terminology and logic between the two standards to make sure they are aligned, determine any corrections needed and apply them to remove any inconsistencies and obstacles for implementation.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
SEMI E167
Both the methodology as well as the terminology needs to be reviewed and aligned with SEMI E175. Potential inconsistencies and technical issues found during review of SEMI E167 and SEMI E175 will be corrected for technical consistency with the purpose to drive standards adoption and implementation.

SEMI E167.1
Synchronize with changes in main standard.

SEMI E175
In case terminology needs to be changed in SEMI E167, the standard has to be adapted for consistency.


b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2022b. 1st Draft by: 07/01/2022
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/01/2022
e. TC Chapter Approval By:04/01/2023

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will incorporate Copyrighted Item



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMI E175 has reproduced copyrighted material, permission has been granted by EtherCAT Technology Group. The proposed changes will not introduce any new reproduced copyrighted material.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/30/2022
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on