SEMI International Standards
Date Prepared: 07/09/2018
Revised (if Applicable):

Name of Task Force (TF): Equipment and Materials Traceability Task Force

Global Technical Committee: Traceability
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)

Defects introduced by process-critical equipment and materials affect final product quality resulting in lower yields and higher manufacturing costs. This Task Force will deal with traceability and verification of
• components such as seals, mass flow controllers, valves, etc.;
• instruments for in-line and off-line data collection and monitoring;
• sub-systems that support process tools e.g. vacuum, abatement, chillers used in semiconductor or related industries.

2. Scope: (Define the specific activities that the TF will conduct.)

The Task Force will develop and maintain Standards relating to and directly concerning Traceability and Verification of Equipment and Materials
This includes, but is not limited to:
• Identification (for example via barcodes, QR Codes);
• Specifying and transferring information (for example, part information, Certificates of Authenticity, Certificates of Compliance, Certificates of Use, etc.);
• Part traceability protocols.

Although work will be primarily considering the semiconductor equipment and materials, it can be applied to other related industries.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
4. Formation Date:(TF formed on)

Task Force formed on: 07/09/2018
Task Force approved by Committee/GCS on: 07/09/2018