SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 10/01/2012Revised (if Applicable): 06/06/2013

Document Number: 5524
SNARF for: Revisions to SEMI E156-0710, Mechanical Specification for 450 mm AMHS
Stocker to Transport Interface, with title change to SPECIFICATION FOR

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: 450 mm AMHS Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Add 450 FOSB and MAC to objects to be transported (currently 450 FOUP only).
Modify expressions that may cause misunderstanding.

b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

1. Modify the title to “Mechanical Specification for Interface between 450mm AMHS Stockers and Transport Equipment (ex. OHS and OHT)”.

2. Modify the first sentence of the “Purpose” as the following: “This specification defines the mechanical interface at transfer of 450-carriers to be handled by 450mm AMHS. 450 carriers should exclusively indicate FOUP, FOSB and MAC for 450mm wafers.” Replace all “FOUP” and “450 FOUP” with “450-Carrier” in the document.

3. Add descriptions of newly defined 450 FOSB and MAC. Add the description “Refer to SEMI M80” for 450 FOSB and “Refer to SEMI E159” for MAC.

4. Determine a single term where “STK LoadPort” and “AMHS LoadPort” are used in the document.

5. Others.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/06/2013b. 1st Draft by: 09/01/2013
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/03/2013
e. TC Chapter Approval By:12/03/2013

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)

Global PIC Committee:
450 mm IPIC Task Force
International 450mm Shipping Box Task Force

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS06/06/2013
Recorded in TC Minutes
Attach Pictures and Files here: