SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/02/2019Revised (if Applicable):

Document Number: 6527
SNARF for: Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

SimpleEvent and Parameters are directly defined in Node Description, in spite of being referenced in StateMachine, SEMI Object and Exception.
In this proposal, Simple Event and Parameter define a separate web service as like StateMachine, SEMIObject and Exception.
As part of supporting HTTP/2 in the EDA Standards with gRPC and Protocol Buffers, some changes may be required to accommodate new better ways of organizing information.
The first part of the SNARF has been previously approved as part of Document # 6452 - Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD). It is included as part of this SNARF because the scope of the activity has changed (with the addition of changes to support HTTP/2 integration), and SNARF #6452 will be abolished.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing EDA that upgrades to the next version

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

Major and technical changes will be made to E125. The Changes to recognize Complementary Files and Materials will be made. Due to changes in E125, E164 should be changed after completion of this proposal. E164 is out of scope in this proposal.
Revise Node Description, StateMachine, SEMIObj and Exception classes, including:
1. Add operations and Arguments definitions of GetParameters, GetSimpleEvents to E125 specification and WSDL. (Change WSDL File)
2. Change Association Definitions of EquipmentNodeDescription, StateMachine, SEMIObj and Exception’s to E125 specification.
3. Refine Parameter Attribute and Association Definition.
4. Refine SimpleEvent Attribute and Association Definition.
5. Change Attributes for Node Description, StateMachine, SEMIObj, Exception to refer Parameter Classes. (Change XML Schema)
6. Change Attributes for Node Description, SEMIObj to refer SimpleEvent Classes. (Change XML Schema)
7. Add new parameter attributes to support “cached data sample” properties.
In addition, allow changes to support and best leverage HTTP/2 integration with gRPC and Protocol Buffers, and general interface improvement. For example,
a. Introduce unsigned integers
b. Possible removal of parameter types that are not generic


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:
SEMI E125

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2019b. 1st Draft by:
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/01/2019
e. TC Chapter Approval By:07/01/2020

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)


b. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is previously known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

Use of patent and copyrighted material is from pre-existing SEMI E125 standard.
NON-ASSERTION AGREEMENT (LOA) between SEMI and Asyst Technologies has been signed with for US Patents #11/340101, #11/107508, #09/899833, and 09/496009, in 2008.

The majority of content for this SNARF was previously approved with SNARF # 6452 - Revision to SEMI E125-0414, Specification for Equipment Self Description (EqSD). The scope of the activity has changed with the addition of changes to support HTTP/2 integration. SNARF #6452 will be abolished.


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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 04/15/2019.
Member Review End Date: 04/29/2019

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/07/2019
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on


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