SNARF for Doc 6339

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 01/08/2018

Revised (if Applicable):

Document Number: 6339
SNARF for: Replacement of SEMI C6.2: Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas, C6.3: Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas, C6.4: Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.5: Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, C6.6: Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas, and C6.7: Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders, into one single document as a New Standard, Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinders

Originating Global Technical Committee: Gases

Originating TC Chapter: North America

Task Force (TF) in which work is to be carried out: Gases Specification Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI C6.2, C6.3, C6.4, C6.5, C6.6 and C6.7 standard documents have relatively same titles, but for different gases. The titles are also nonconforming. This task force would like to replace these and combine into one single new standard while making it compliant to SEMI rules and regulations.

b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This document addresses gases specifications, specifically, particle specifications for Oxygen bulk supply gas, Hydrogen, Nitrogen and Argon bulk supply gases. We will combine these into one single document to avoid confusion.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 01/15/2018	b. 1st Draft by: 02/07/2018
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 02/21/2018
e. TC Chapter Approval By:04/10/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Liquid Chemicals
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

will NOT include reproduced copyrighted material

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Passed A&R Cycle 8-2018

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 01/08/2018
Member Review End Date: 01/21/2018

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	02/05/2018
Recorded in TC Minutes	04/10/2018

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

SNARF_Replacement of SEMI C6.2-6.7.pdf SNARF_Replacement of SEMI C6.2-6.7.doc