SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/14/2010Revised (if Applicable):

Document Number: 5069
SNARF for: New Standard: Specification for 450 mm Wafer Shipping System

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: International 450 mm Shipping Box
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
450 mm wafers are expected to be used for the next generation Fab.
The standards for 450 mm wafer specification (mechanical and developmental wafer) and for 450 mm in-fab carriers & Loadport have been approved at technical committees and some are published already.
Yellow ballot for 450 mm Shipping Box Specification document 4760 was reviewed at SEMICON West 2010, and re-ballot document 4760 A is to be issued for cycle 7, 2010 by solving remaining issues. The development of 450mm Wafer Shipping System Standard is requested as a next step.

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
- The materials, dimensions and necessary items related to 450 mm wafer shipping system, such as wafer shipping boxes, bags, labels, cushions, secondary containers, pallets, and shipping documentation.
- Review 300 mm wafer shipping system SEMI M45, and define appropriate shipping system for 450 mm wafer.
- Standardization items such as
* Drop Height Assumption
* Wafer Shipping Box Bagging System
* Wafer Shipping Box and Bag Labeling
* Secondary Container Labeling
* Secondary Container
* Cushions
* Pallet
* Shipment Documentation
* Transportation Logistics

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/01/2010b. 1st Draft by: 12/03/2010
c. (Optional) Informational Ballot by: 04/01/2011d. Letter Ballot by: 07/15/2011
e. TC Chapter Approval By:12/01/2011

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
International 450 mm PI &C Task Force
NA PIC Committee
NA 450 mm Shipping Box TF
Japan PIC Committee
Japan Silicon Wafer Committee
NA Silicon Wafer Committee
Japan Shipping Box TF

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual 7):

c. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS09/14/2010
Recorded in TC Minutes


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on