SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/04/2005

Revised (if Applicable):

Name of Task Force (TF): NA Microlithography Committee for 5-Year Review

Global Technical Committee: Micropatterning

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Review SEMI Standards that are due for their 5-Year Review
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2. Scope: (Define the specific activities that the TF will conduct.)
Micropatterning Standards
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.