SNARF for Doc 6916

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 01/18/2022

Revised (if Applicable):

Document Number: 6916
SNARF for: Replacement of SEMI F109-0212, Guide for Heater Systems Requirements,
as a New Standard: Guide for Material Selection for Heaters

Originating Global Technical Committee: Gases

Originating TC Chapter: North America

Task Force (TF) in which work is to be carried out: Heater Jacket Task Force

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

1. The continuing demand for higher performing heater systems in the semiconductor-manufacturing sector is requiring standardization due to numerous issues impacting the customer/user base and the manufacturers of heater systems for the semiconductor equipment industry.

2. Heater Materials Guideline to be used to determine the safe material construction in type ranges of temperature requirements. Primary standard to be based upon four levels of use: low (0°C – 100°C), medium (100°C – 200°C) high (200°C – 300°C) and ultrahigh (300°C and above)

3.Watt density guideline for materials use would be natural attribute of this guideline purpose: (Low 0 – 10 watt) (medium 10 – 100 watt/in) (high 100 – 1000 watts/in) (ultrahigh 1000 – above/watt/in)
Cleanroom standards to materials guidelines, and safety standards for human health.
4. This new guide provide supplemental information on the material appropriate to the heating requirement. While the original F109 discuss considerable and requirements in engineering this is now complemented with guideline of material science directed at the appropriate heater technology and associated materials for use in a heater system.

5. This revised Guideline now offers complete guide from engineering to materials science considerations in the design of semiconductor surface heater systems.

b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: heater manufacturers

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

1. Create a matrix of materials at each level of 3 tier system of use as in low risk, medium use risk and high use range. The phase change point being the end point of the material phase change point.

2. Risk defined as temperature phase change, wattage density risk, particle contamination risk

3. Safety issues related to use temperature range.

This document will provide a uniform list of requirements for heater materials to establish specifications for product design, development, test, and manufacturing.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 03/29/2022	b. 1st Draft by: 05/01/2022
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 09/01/2022
e. TC Chapter Approval By:11/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

the incorporation of Copyrighted Item will NOT be required

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
6916A version changed title from " Guide for Material Selection for Heater Systems" to " Guide for Material Selection for Heaters"

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 01/28/2022
Member Review End Date: 02/10/2022

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ś 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	03/29/2022
Recorded in TC Minutes

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on

SNARF_GuideHeaterMaterials (replacement) v2.doc SNARF_GuideHeaterMaterials (replacement) v2.pdf